EBlink doesn't connect

[Polarisru]

Hello, I try to connect to ATSAMC21 MCU using EBlink but without success.


Here are project settings:


And this is a log:

Code:

EBlink version 4.7-[13] by Gerard Zagema

Using EB_SCRIPT_PATH = C:\Program Files (x86)\EBlink\scripts

Interface      : STlink
Device found at bus 1:28
Interface USB# : 55FF6C064883545237160887
Interface at  1:28 - <BUS>:<ADDR>
Interface type : STlink/V2
STlink Frmware : V2.J29.S7
STlink connect : Under reset
Unknown/unexpected STLINK status code 0x9
STlink connect : Try again with active reset
Unknown/unexpected STLINK status code 0x9
STlink connect : connect under reset failed, try without reset
Error initializing interface STlink
Target power perhaps?
STlink connect : Hot plugging
Unknown/unexpected STLINK status code 0x9
Target voltage : 3.23V

The PCB is definitely connected and powered, ST-Link is also Ok, I have tested it.

What could be wrong here?